Semiconductor device and method for manufacturing the same

ABSTRACT

According to one embodiment, a semiconductor device includes first to fourth semiconductor regions, a first electrode, and a first insulating film. The first semiconductor region includes a first partial region and a second partial region. The second semiconductor region is separated from the first partial region. The third semiconductor region is provided between the first partial region and the second semiconductor region. The third semiconductor region includes a third partial region and a fourth partial region. The first electrode is separated from the second partial region and is separated from the second semiconductor region and the third semiconductor region. The first insulating film includes a first insulating region and a second insulating region. The fourth semiconductor region includes a first portion. The first portion is provided between the fourth partial region and at least a portion of the first insulating film.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.15/690,481, filed Aug. 30, 2017, now U.S. Pat. No. 10,243,037, which isbased upon and claims the benefit of priority from Japanese PatentApplication No. 2016-212712, filed on Oct. 31, 2016; the entire contentsall of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a semiconductor deviceand a method for manufacturing the same.

BACKGROUND

It is desirable to reduce the on-resistance of a semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A and FIG. 1B are schematic views illustrating a semiconductordevice according to a first embodiment;

FIG. 2 is a schematic view illustrating the characteristics of thesemiconductor device according to the embodiment;

FIG. 3A and FIG. 3B are graphs illustrating characteristics of thesemiconductor device;

FIG. 4A and FIG. 4B are graphs illustrating the characteristics of thesemiconductor device;

FIG. 5 is a graph illustrating the characteristics of the semiconductordevice;

FIG. 6A and FIG. 6B are graphs illustrating the characteristics of thesemiconductor device;

FIG. 7A and FIG. 7B are graphs illustrating the characteristics of thesemiconductor device;

FIG. 8 is a graph illustrating a characteristic of the semiconductordevice;

FIG. 9A to FIG. 9D are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the first embodiment;

FIG. 10A and FIG. 10B are schematic views illustrating a semiconductordevice according to a second embodiment;

FIG. 11A to FIG. 11E are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the second embodiment;

FIG. 12 is a schematic cross-sectional view illustrating a semiconductordevice according to a third embodiment; and

FIG. 13 is a schematic cross-sectional view illustrating anothersemiconductor device according to the third embodiment.

DETAILED DESCRIPTION

According to one embodiment, a semiconductor device includes first tofourth semiconductor regions, a first electrode, and a first insulatingfilm. The first semiconductor region includes a first partial region anda second partial region and is of a first conductivity type. The secondsemiconductor region is separated from the first partial region in asecond direction crossing a first direction. The second semiconductorregion is of the first conductivity type. The first direction is fromthe first partial region toward the second partial region. The thirdsemiconductor region is provided between the first partial region andthe second semiconductor region. The third semiconductor region is of asecond conductivity type and includes a third partial region and afourth partial region. The fourth partial region is positioned betweenthe first partial region and the third partial region. The firstelectrode is separated from the second partial region in the seconddirection and is separated from the second semiconductor region and thethird semiconductor region in the first direction. The first insulatingfilm includes a first insulating region and a second insulating region.The first insulating region is provided between the second semiconductorregion and the first electrode in the first direction and between thethird semiconductor region and the first electrode in the firstdirection. A portion of the first insulating region contacts the thirdpartial region. The second insulating region is provided between thesecond partial region and the first electrode in the second direction.The fourth semiconductor region includes a first portion and is of thefirst conductivity type. The first portion is provided between thefourth partial region and at least a portion of the first insulatingfilm in the first direction. A first impurity concentration of the firstconductivity type in the fourth semiconductor region is higher than asecond impurity concentration of the first conductivity type in thefirst partial region.

According to another embodiment, a method for manufacturing asemiconductor device is disclosed. The method can include forming atrench in a stacked body. The stacked body includes a firstsemiconductor film of a first conductivity type, a third semiconductorfilm of a second conductivity type, and a second semiconductor film ofthe first conductivity type. The first semiconductor film is provided ona substrate. The third semiconductor film is provided on the firstsemiconductor film. The second semiconductor film is provided on thethird semiconductor film. The trench is formed from the secondsemiconductor film. The method can include introducing an impurity ofthe first conductivity type into a lower portion of a side surface ofthe third semiconductor film exposed at a side wall of the trench. Aconcentration of the impurity of the first conductivity type in thelower portion is higher than a concentration of an impurity of thesecond conductivity type in the lower portion. In addition, the methodcan include forming a first insulating film on a surface of the trenchafter the introducing of the impurity into the lower portion, andforming a first electrode by introducing a conductive material into aremaining space in the trench after the forming of the first insulatingfilm.

Various embodiments will be described hereinafter with reference to theaccompanying drawings.

The drawings are schematic and conceptual; and the relationships betweenthe thickness and width of portions, the proportions of sizes amongportions, etc., are not necessarily the same as the actual valuesthereof. Further, the dimensions and proportions may be illustrateddifferently among drawings, even for identical portions.

In the specification and drawings, components similar to those describedor illustrated in a drawing thereinabove are marked with like referencenumerals, and a detailed description is omitted as appropriate.

First Embodiment

FIG. 1A and FIG. 1B are schematic views illustrating a semiconductordevice according to a first embodiment.

FIG. 1A is a cross-sectional view corresponding to a cross section alongline B1-B2 shown in FIG. 1B. FIG. 1B is a perspective view when cutalong line A1-A2 of FIG. 1A.

As shown in FIG. 1A and FIG. 1B, the semiconductor device 110 accordingto the embodiment includes first to fourth semiconductor regions 11 to14, a first electrode 21, and a first insulating film 31.

The first semiconductor region 11 includes a first partial region 11 aand a second partial region 11 b. The first semiconductor region 11 isof a first conductivity type.

The direction from the first partial region 11 a toward the secondpartial region 11 b is taken as a first direction D1.

The first direction D1 is taken as an X-axis direction. One directionperpendicular to the X-axis direction is taken as a Z-axis direction. Adirection perpendicular to the X-axis direction and the Z-axis directionis taken as a Y-axis direction.

A second semiconductor region 12 is separated from the first partialregion 11 a in a second direction D2. The second direction D2 crossesthe first direction D1. For example, the second direction D2 is, forexample, the Z-axis direction.

The second direction D2 is the stacking direction of the first partialregion 11 a and the second semiconductor region 12. The stackingdirection may be taken as the Z-axis direction; and a direction crossingthe Z-axis direction may be taken as the first direction D1.

The second semiconductor region 12 is of the first conductivity type.

A third semiconductor region 13 is provided between the first partialregion 11 a and the second semiconductor region 12. The thirdsemiconductor region 13 is of a second conductivity type.

For example, the first conductivity type is of an n-type; and the secondconductivity type is of a p-type. In the embodiments, the firstconductivity type may be the p-type; and the second conductivity typemay be the n-type. In the description hereinbelow, the firstconductivity type is taken to be the n-type; and the second conductivitytype is taken to be the p-type.

The third semiconductor region 13 includes a third partial region 13 cand a fourth partial region 13 d. In the example, the thirdsemiconductor region 13 further includes a fifth partial region 13 e.

The fourth partial region 13 d is positioned between the first partialregion 11 a and the third partial region 13 c in the second directionD2. The fifth partial region 13 e is provided between the fourth partialregion 13 d and the first partial region 11 a in the second directionD2.

For example, the third semiconductor region 13 is provided on the firstpartial region 11 a of the first semiconductor region 11; and the secondsemiconductor region 12 is provided on the third semiconductor region13. The fifth partial region 13 e of the third semiconductor region 13is provided on the first partial region 11 a. The fourth partial region13 d is provided on the fifth partial region 13 e. The third partialregion 13 c is provided on the fourth partial region 13 d.

For example, the impurity concentration of the second conductivity type(e.g., the p-type) in the third partial region 13 c is higher than theimpurity concentration of the second conductivity type in the fourthpartial region 13 d. For example, the impurity concentration of thesecond conductivity type in the fourth partial region 13 d is higherthan the impurity concentration of the second conductivity type in thefifth partial region 13 e. For example, the impurity concentration ofthe second conductivity type (e.g., the p-type) increases upward.

The first electrode 21 is separated from the second partial region 11 bin the second direction D2 (e.g., the Z-axis direction). The firstelectrode 21 is separated from the second semiconductor region 12 andthe third semiconductor region 13 in the first direction D1 (e.g., theX-axis direction).

As described below, the first electrode 21 is used as a gate electrode.The second partial region 11 b of the first semiconductor region 11 is aregion positioned under the gate electrode.

The first insulating film 31 includes a first insulating region 31 a anda second insulating region 31 b. The first insulating region 31 a isprovided between the second semiconductor region 12 and the firstelectrode 21 in the first direction D1 (e.g., the X-axis direction) andbetween the third semiconductor region 13 and the first electrode 21 inthe first direction. A portion of the first insulating region 31 acontacts the third partial region 13 c.

The second insulating region 31 b is provided between the second partialregion 11 b and the first electrode 21 in the second direction D2 (e.g.,the Z-axis direction).

The first insulating region 31 a corresponds to the side portion of thefirst insulating film 31. The second insulating region 31 b correspondsto the bottom portion of the first insulating film 31.

The fourth semiconductor region 14 includes a first portion 14 p. Asdescribed below, the fourth semiconductor region 14 may further includea second portion 14 q. The fourth semiconductor region 14 is of thefirst conductivity type (e.g., the n-type).

The first portion 14 p is provided between the fourth partial region 13d and at least a portion of the first insulating film 31 in the firstdirection D1 (e.g., the X-axis direction).

For example, at least a portion of the first portion 14 p is positionedbetween the fourth partial region 13 d and the second insulating region31 b (the bottom portion) in the first direction D1 (e.g., the X-axisdirection). For example, a portion of the first portion 14 p may bepositioned between the first insulating region 31 a (the side portion)and the fourth partial region 13 d in the first direction D1.

In the example, the semiconductor device 110 further includes a sixthsemiconductor region 16, a seventh semiconductor region 17, a secondelectrode 22, a third electrode 23, and a second insulating film 32. Afifth semiconductor region 15 described below may be further provided.

The second electrode 22 is electrically connected to the secondsemiconductor region 12. The second insulating film 32 is providedbetween the first electrode 21 and a portion of the second electrode 22.The second insulating film 32 electrically insulates between the firstelectrode 21 and the second electrode 22.

The sixth semiconductor region 16 is electrically connected to thesecond electrode 22. The sixth semiconductor region 16 is of the secondconductivity type (e.g., the p-type). The second semiconductor region 12is provided between the sixth semiconductor region 16 and a portion ofthe first insulating film 31 in the first direction D1 (e.g., the X-axisdirection). A portion of the third semiconductor region 13 is providedbetween the sixth semiconductor region 16 and the first semiconductorregion 11 in the second direction D2 (e.g., the Z-axis direction).

The third electrode 23 is electrically connected to the firstsemiconductor region 11. The first semiconductor region 11 is providedbetween the third electrode 23 and the third semiconductor region 13 andbetween the third electrode 23 and the first insulating film 31.

The seventh semiconductor region 17 is provided between the thirdelectrode 23 and the first semiconductor region 11. The seventhsemiconductor region 17 is of the first conductivity type (e.g., then-type). For example, the seventh semiconductor region 17 is asemiconductor substrate.

For example, in the embodiment, the first to fourth semiconductorregions 11 to 14 include, for example, silicon carbide (SiC). The sixthsemiconductor region 16 and the seventh semiconductor region 17 also mayinclude silicon carbide.

The impurity of the first conductivity type (e.g., the n-type) is, forexample, a Group III element. The impurity of the first conductivitytype includes, for example, at least one selected from the groupconsisting of Al and B. The impurity of the second conductivity type(e.g., the p-type) is, for example, a Group V element. The impurity ofthe second conductivity type includes, for example, at least oneselected from the group consisting of N, P, and As.

The first semiconductor region 11 functions as, for example, an n-typedrift layer. The second semiconductor region 12 functions as, forexample, an n-type source region. The third semiconductor region 13functions as, for example, a p-type base region. The first electrode 21functions as, for example, a gate electrode. The first insulating film31 functions as, for example, a gate insulating film. The secondelectrode 22 functions as, for example, a source electrode. The thirdelectrode 23 functions as, for example, a drain electrode. The secondinsulating film 32 functions as, for example, an inter-layer insulatingfilm.

As shown in FIG. 1B, the first electrode 21 extends along the seconddirection D2 and a third direction D3. The third direction D3 crossesthe first direction D1 and the second direction D2. The third directionD3 is, for example, the Y-axis direction. The first electrode 21 is, forexample, a gate electrode having a trench configuration. For example, astacked body that includes semiconductor regions is provided on theseventh semiconductor region 17 (e.g., a semiconductor substrate); and atrench is formed in the stacked body. The first insulating film 31 isformed on the inner wall inside the trench. Then, the first electrode 21is formed by filling a conductive material into the remaining space ofthe trench. The semiconductor device 110 is, for example, a MOSFET(metal-oxide-semiconductor field-effect transistor) SiC transistorincluding a gate electrode having a trench configuration.

As shown in FIG. 1B, the fourth semiconductor region 14 extends alongthe first electrode 21. The fourth semiconductor region 14 extends alongthe third direction D3.

In the embodiment, a first impurity concentration of the firstconductivity type (e.g., the n-type) in the fourth semiconductor region14 is higher than a second impurity concentration of the firstconductivity type in the first partial region 11 a.

Thus, in the semiconductor device 110 according to the embodiment, thefourth semiconductor region 14 in which the impurity concentration ofthe first conductivity type is high is provided between a portion of thethird semiconductor region 13 and a portion of the first insulating film31. It was found that a semiconductor device can be provided in whichthe on-resistance can be reduced thereby.

In the semiconductor device 110, the fourth semiconductor region 14 isused as another portion of the current path. It is considered that whena gate bias is applied, for example, a region having a high carrierdensity (e.g., an accumulation channel) is induced locally in theportion of the fourth semiconductor region 14 at the vicinity of thefirst insulating film 31. The region of the accumulation channel isnarrow. Therefore, a low on-resistance is obtained even in the casewhere the fourth semiconductor region 14 is thin (the length in theX-axis direction is short).

The thickness (the length in the X-axis direction) of the first portion14 p of the fourth semiconductor region 14 is thin. For example, athickness w4 along the first direction D1 of the first portion 14 p(referring to FIG. 1A) is not less than 0.015 μm and not more than 0.45μm. It is easy to reduce the cell pitch because the thickness w4 isthin. An example of the relationship between the thickness w4 and thecharacteristics is described below.

For example, in a first reference example having a double trenchstructure, a trench is provided to relax the electric field at the gateinsulating film. However, it is difficult to reduce the cell pitch dueto the trench for relaxing the electric field. Conversely, in theembodiment, it is easy to reduce the cell pitch. Thereby, an even loweron-resistance is obtained.

An example of simulation results of the characteristics of thesemiconductor device 110 will now be described.

The following model is used in the simulation. The thickness in theZ-axis direction of the first semiconductor region 11 is 9 μm. Then-type impurity concentration of the first semiconductor region 11 is8×10¹⁵/cm³. The thickness in the Z-axis direction of the secondsemiconductor region 12 is 0.15 μm. The n-type impurity concentration ofthe second semiconductor region 12 is 1×10²⁰/cm³. The thickness in theZ-axis direction of the third partial region 13 c is 0.35 μm. The p-typeimpurity concentration of the third partial region 13 c is 8×10¹⁷/cm³.The thickness in the Z-axis direction of the fourth partial region 13 dis 0.3 μm. The p-type impurity concentration of the fourth partialregion 13 d is 5×10¹⁷/cm³. The thickness in the Z-axis direction of thefifth partial region 13 e is 0.15 μm. The p-type impurity concentrationof the fifth partial region 13 e is 5×10¹⁶/cm³. The thickness in theZ-axis direction of the fourth semiconductor region 14 is 0.35 μm. Thethickness (the thickness w4) in the X-axis direction of the fourthsemiconductor region 14 is 0.05 μm. The n-type impurity concentration ofthe fourth semiconductor region 14 is 4×10¹⁷/cm³. The thickness (alength to shown in FIG. 1A) of the first insulating region 31 a is 80nm. The thickness (a length tb shown in FIG. 1A) of the secondinsulating region 31 b is 250 nm. An example of the simulation resultswill now be described for the characteristics when 25 V is applied tothe first electrode 21, 0 V is applied to the second electrode 22, and0.3 V is applied to the third electrode 23 (when ON).

FIG. 2 is a schematic view illustrating the characteristics of thesemiconductor device according to the embodiment.

FIG. 2 corresponds to a cross section when the semiconductor device 110is cut by the YZ plane. The position of the cutting includes theposition of the center in the X-axis direction of the first electrode21. In FIG. 2, the curved contour lines correspond to the contour linesof the quasi-Fermi potential of the electrons. In FIG. 2, the shade ofthe image corresponds to the current density. The current density in theregion where the shade is dark is higher than the current density in theregion where the shade is light.

As shown in FIG. 2, the current density is locally high at the vicinityof the interface between the first insulating film 31 and the lowerportion of the second semiconductor region 12, the interface between thefourth semiconductor region 14 and the first insulating film 31, and thevicinity of the interface between the first insulating film 31 and theupper portion of the first semiconductor region 11. In the current pathbetween the second semiconductor region 12 and the first semiconductorregion 11, the current flows locally in the interface portion of thefourth semiconductor region 14 with the first insulating film 31.

The resistance (the on-resistance) of the current path is low. Thecharacteristic on-resistance (RonA) is, for example, about 1.4 mΩ·cm².The characteristic on-resistance is the product of the on-resistance(Ron) and the surface area (A) of the channel formation region. Thus,the low on-resistance (or the characteristic on-resistance) is obtaineddue to the fourth semiconductor region 14 according to the embodiment.

On the other hand, the maximum electric field applied to the firstinsulating film 31 is determined for a configuration of the simulationconditions. For example, the maximum electric field is 3 MV/cm or lesswhen the gate-source voltage is set to 0 V and the drain-source voltageis set to 1200 V. The breakdown voltage of the first insulating film 31is sufficiently higher than this value. For example, good long-termreliability is obtained. As described below, the voltage at whichavalanche breakdown occurs exceeds 1600 V.

Thus, in the embodiment, the maximum electric field that is applied tothe first insulating film 31 is suppressed; and the on-resistance can besmall while maintaining a high voltage at which avalanche breakdownoccurs.

On the other hand, in a second reference example in which the fourthsemiconductor region 14 such as that recited above is not provided, aconfiguration may be considered in which the maximum electric fieldapplied to the first insulating film 31 is set to 3 MV/cm or less, andthe voltage at which avalanche breakdown occurs exceeds 1600 V. In sucha case, the impurity concentration of the region under the trench is setto be sufficiently high for electric field relaxation. For example, then-type impurity concentration of this region is higher than the impurityconcentration of the p-type region (the third semiconductor region 13)positioned at the upper portion and exceeds, for example, 1×10¹⁸/cm³.However, in the configuration of the second reference example, theon-resistance (the JFET resistance component) is large.

Thus, in the embodiment, the maximum electric field is suppressed; and alow on-resistance is obtained while suppressing the avalanche breakdown.

For example, a low on-resistance is obtained even in the case where thethickness w4 (the width) along the first direction D1 of the firstportion 14 p of the fourth semiconductor region 14 is set to be thin(narrow). Because the thickness w4 (the width) is thin, for example, thecurvature of the equipotential lines at the trench bottom is suppressed.For example, the concentration of the electric field is relaxed.Thereby, in the embodiment, it is considered that the high breakdownvoltage of the first insulating film 31 is obtained. For example, it isconsidered that a semiconductor device having a high breakdown voltageis obtained.

Thus, according to the embodiment, a low on-resistance is obtained.

FIG. 3A and FIG. 3B are graphs illustrating characteristics of thesemiconductor device.

These figures illustrate the relationships between the characteristicsof the semiconductor device and the thickness w4 (the width) along thefirst direction D1 of the first portion 14 p of the fourth semiconductorregion 14. In these figures, the horizontal axis is the thickness w4.The vertical axis of FIG. 3A is a characteristic on-resistance RonA(mΩ·cm²). The vertical axis of FIG. 3B is a breakdown voltage Vb (V).The breakdown voltage Vb (V) corresponds to, for example, the voltage atwhich avalanche breakdown occurs. In FIG. 3A and FIG. 3B, other than thethickness w4, the conditions of the simulation are the same as theconditions described in reference to FIG. 2. A small characteristicon-resistance RonA corresponds to a small (low) on-resistance Ron.

As shown in FIG. 3A, the characteristic on-resistance RonA becomes largewhen the thickness w4 is excessively small. For example, thecharacteristic on-resistance RonA increases markedly when the thicknessw4 is less than 0.015 μm. It is considered that this is caused byinsufficient formation of the accumulation channel. A smallcharacteristic on-resistance RonA is obtained when the thickness w4 is0.015 μm or more. A small characteristic on-resistance RonA is obtainedstably when the thickness w4 is 0.04 μm or more.

As shown in FIG. 3B, the breakdown voltage Vb decreases when thethickness w4 becomes large. For example, the breakdown voltage Vbdecreases abruptly when the thickness w4 exceeds 0.45 μm.

In the embodiment, it is favorable for the thickness w4 to be, forexample, not less than 0.015 μm and not more than 0.45 μm. Thereby, asmall characteristic on-resistance RonA and a high breakdown voltage Vbare obtained. It is more favorable for the thickness w4 to be 0.04 μm ormore. A small characteristic on-resistance RonA is obtained stably.

For example, the breakdown voltage Vb decreases easily when the firstimpurity concentration (the impurity concentration of the firstconductivity type in the fourth semiconductor region 14) becomes high.Therefore, it is more favorable for the thickness w4 to be small (e.g.,0.40 μm or less) in the case where the first impurity concentration ishigh. From the perspective of the breakdown voltage Vb, it is morefavorable for the thickness w4 to be 0.30 μm or less; and it is evenmore favorable for the thickness w4 to be 0.20 μm or less.

In the embodiment, considering a practical first electrode 21, forexample, the thickness w4 is not less than 0.02 times and not more than0.75 times a length w21 (the width) along the first direction D1 of thefirst electrode 21 when the thickness w4 is not less than 0.015 μm andnot more than 0.45 μm.

In the embodiment, a high breakdown voltage can be maintained. In theembodiment, the maximum electric field of the first insulating film 31(the gate insulating film) substantially does not degrade. In theembodiment, the high reliability of the gate insulating film can bemaintained. It is possible to reduce the cell pitch. A low on-resistanceis obtained.

As described above, the first impurity concentration (the impurityconcentration of the first conductivity type in the fourth semiconductorregion 14) is higher than the second impurity concentration (theimpurity concentration of the first conductivity type in the firstpartial region 11 a). For example, the first impurity concentration isnot less than 1×10¹⁷/cm³ and not more than 5×10¹⁸/cm³. On the otherhand, the second impurity concentration is, for example, not less than1×10¹⁵/cm³ and not more than 1×10¹⁸/cm³.

When the first impurity concentration is lower than 1×10¹⁷/cm³, forexample, the depletion region that extends from the third semiconductorregion 13 toward the fourth semiconductor region 14 enlarges; and theaccumulation channel is not formed easily. Therefore, there are caseswhere the on-resistance increases. When the first impurity concentrationis higher than 5×10¹⁸/cm³, for example, the maximum electric field ofthe first insulating film 31 (the gate insulating film) of the trenchside wall increases. Therefore, for example, there are cases where thereliability of the gate insulating film decreases. For example, thereare cases where the breakdown voltage decreases.

There is a tendency for the maximum electric field applied to the firstinsulating film 31 (the gate insulating film) to be high when thethickness w4 is large. There is a tendency for the maximum electricfield applied to the first insulating film 31 to be high when the firstimpurity concentration (the impurity concentration of the firstconductivity type in the fourth semiconductor region 14) is high. Anexcessively high maximum electric field can be suppressed when thethickness w4 is 0.45 μm or less. For example, when the thickness w4 is0.40 μm or less, the excessively high maximum electric field can besuppressed effectively even in the case where the first impurityconcentration is high. From the perspective of the maximum electricfield, it is more favorable for the thickness w4 to be 0.30 μm or less;and it is more favorable for the thickness w4 to be 0.20 μm or less.

An example of the change of the characteristics when the impurityconcentrations in the semiconductor regions are changed will now bedescribed. The impurity concentration of the fourth semiconductor region14 and the impurity concentration of the fourth partial region 13 d willbe focused upon. For example, the first impurity concentration (theimpurity concentration of the first conductivity type in the fourthsemiconductor region 14) is modified.

On the other hand, the impurity concentration (an impurity concentrationC13 d) of the second conductivity type in the fourth partial region 13 dis modified. As described below, for example, the fourth partial region13 d may be formed by ion-implanting the impurity of the secondconductivity type into a semiconductor region of the first conductivitytype. In such a case, the fourth partial region 13 d also includes theimpurity of the first conductivity type in addition to the impurity ofthe second conductivity type. However, the impurity concentration of thefirst conductivity type included in the fourth partial region 13 d issufficiently low compared to the impurity concentration of the secondconductivity type. The impurity concentration C13 d of the fourthpartial region 13 d (the impurity concentration of the secondconductivity type) may be considered to correspond to the effectivecarrier concentration of the fourth partial region 13 d.

On the other hand, the fourth semiconductor region 14 also is formed by,for example, ion implantation. For example, the fourth semiconductorregion 14 also includes the impurity of the first conductivity type andthe impurity of the second conductivity type. In the following model,the impurity concentration (the second impurity concentration) of thesecond conductivity type included in the fourth semiconductor region 14is the same as the impurity concentration of the second conductivitytype included in the fourth partial region 13 d. In such a case, theimpurity concentration (the first impurity concentration) of the firstconductivity type included in the fourth semiconductor region 14 ismodified.

FIG. 4A and FIG. 4B are graphs illustrating the characteristics of thesemiconductor device.

These figures illustrate the simulation results of the characteristicswhen a first impurity concentration C1 (the impurity concentration ofthe first conductivity type in the fourth semiconductor region 14) ischanged. In the simulation, the impurity concentration C13 d of thesecond conductivity type in the fourth partial region 13 d is constantand is 2×10¹⁷/cm³. In such a case, the first impurity concentration C1is modified. Otherwise, the conditions are the same as those describedin reference to FIG. 2. The horizontal axis of FIG. 4A is the thicknessw4. The vertical axis of FIG. 4A is the characteristic on-resistanceRonA.

It can be seen from FIG. 4A that the characteristic on-resistance RonAbecomes small when the first impurity concentration C1 is high. Thecharacteristic on-resistance RonA increases abruptly when the thicknessw4 (the width) becomes narrow (becomes small). Even for four types ofthe first impurity concentration C1, the characteristic on-resistanceRonA increases abruptly when the characteristic on-resistance RonAexceeds 1.7 mΩ·cm². If the characteristic on-resistance RonA is 1.7mΩ·cm² or less, a small characteristic on-resistance RonA is obtainedeven when the width w4 is changed.

A width parameter Lw4 that relates to the width w4 is introduced. Thewidth parameter Lw4 is the minimum thickness w4 (the width) at where thecharacteristic on-resistance RonA is 1.7 mΩ·cm² or less. From theresults of FIG. 4A, the width parameter Lw4 can be derived for the fourtypes of the first impurity concentration C1.

The horizontal axis of FIG. 4B is the first impurity concentration C1.The vertical axis of FIG. 4B is the width parameter Lw4 (μm). The widthparameter Lw4 becomes small when the first impurity concentration C1becomes high. For example, if the first impurity concentration C1 ishigh, a small characteristic on-resistance RonA is obtained even whenthe width w4 is small.

FIG. 5 is a graph illustrating the characteristics of the semiconductordevice.

In FIG. 5, the impurity concentration C13 d of the second conductivitytype in the fourth partial region 13 d is 4×10¹⁷/cm³. The horizontalaxis of FIG. 5 is the thickness w4. The vertical axis of FIG. 5 is thecharacteristic on-resistance RonA. It can be seen from FIG. 5 that ifthe first impurity concentration C1 is high, the characteristicon-resistance RonA is small even in the case where the impurityconcentration C13 d of the second conductivity type in the fourthpartial region 13 d is 4×10¹⁷/cm³. The characteristic on-resistance RonAincreases abruptly when the thickness w4 (the width) becomes narrow(becomes small). Comparing FIG. 4A and FIG. 5, the width w4 at which thecharacteristic on-resistance RonA is 1.7 mΩ·cm² or less changes due tothe first impurity concentration C1 and the impurity concentration C13d.

Characteristics when the relative relationship between the firstimpurity concentration C1 and the impurity concentration C13 d ischanged will now be described. As described above, the fourthsemiconductor region 14 includes the impurity of the first conductivitytype and the impurity of the second conductivity type. The impurityconcentration of the first conductivity type in the fourth semiconductorregion 14 is the first impurity concentration C1. The impurityconcentration of the second conductivity type in the fourthsemiconductor region 14 is the second impurity concentration. The secondimpurity concentration is the same as the impurity concentration C13 d.

A concentration parameter RC for the impurity concentration isintroduced. The concentration parameter RC is (C1−C13 d)/C13 d. (C1−C13d) corresponds to the difference between the second impurityconcentration and the first impurity concentration in the fourthsemiconductor region 14. (C1−C13 d) corresponds to the effectiveimpurity concentration (the effective impurity concentration of thefirst conductivity type) in the fourth semiconductor region 14. On theother hand, as described above, the impurity concentration of the firstconductivity type in the fourth partial region 13 d is sufficiently low.Therefore, the impurity concentration C13 d corresponds to the effectivecarrier concentration (the effective impurity concentration of thesecond conductivity type) in the fourth partial region 13 d.

FIG. 6A, FIG. 6B, FIG. 7A, and FIG. 7B are graphs illustrating thecharacteristics of the semiconductor device.

In FIG. 6A, the concentration parameter RC is 0.5. In FIG. 6B, theconcentration parameter RC is 1.0. In FIG. 7A, the concentrationparameter RC is 2.0. In FIG. 7B, the concentration parameter RC is 4.0.The impurity concentration C13 d of the second conductivity type in thefourth partial region 13 d is modified in these figures. In thesefigures, the horizontal axis is the thickness w4. The vertical axis isthe characteristic on-resistance RonA.

It can be seen from these figures that the characteristic on-resistanceRonA becomes small when the impurity concentration C13 d is low. Thecharacteristic on-resistance RonA increases abruptly when the thicknessw4 (the width) becomes narrow (becomes small).

FIG. 8 is a graph illustrating a characteristic of the semiconductordevice.

The horizontal axis of FIG. 8 is the concentration parameter RC. Thevertical axis of FIG. 8 is the width parameter Lw4. It can be seen fromFIG. 8 that the width parameter Lw4 is small when the concentrationparameter RC is high. If the concentration parameter RC is high, a smallcharacteristic on-resistance RonA is obtained even when the thickness w4(the width) is small.

For example, there are cases where a depletion layer is formed betweenthe fourth semiconductor region 14 and the fourth partial region 13 d.For example, the depletion layer extends along the X-axis direction. Itis considered that the width of the depletion layer extending toward thefourth semiconductor region 14 is suppressed to be narrow when theimpurity concentration C13 d of the second conductivity type(corresponding to the impurity concentration of the second conductivitytype in the fourth semiconductor region 14) is constant and the firstimpurity concentration C1 (the impurity concentration of the firstconductivity type in the fourth semiconductor region 14) increases.Thereby, it is considered that a wide current path is obtained; and alow on-resistance is obtained.

As shown in FIG. 1A, for example, the fifth partial region 13 e of thethird semiconductor region 13 does not overlap the second insulatingregion 31 b of the first insulating film 31 in the first direction D1(e.g., the X-axis direction). The fifth partial region 13 e is providedon the first partial region 11 a. The lower end of the thirdsemiconductor region 13 is positioned lower than the lower end of thefirst insulating film 31.

A portion of the first electrode 21 in the first direction D1 (e.g., theX-axis direction) overlaps a portion of the fourth semiconductor region14. For example, the lower end of the first electrode 21 is positionedhigher than the lower end of the fourth semiconductor region 14.

In the example, the fourth semiconductor region 14 further includes thesecond portion 14 q in addition to the first portion 14 p. The secondportion 14 q overlaps the first insulating region 31 a in the seconddirection D2 (the Z-axis direction). The second portion 14 q may overlapa portion of the second insulating region 31 b in the second directionD2 (the Z-axis direction). The second portion 14 q may overlap a portionof the first electrode 21 in the second direction D2 (the Z-axisdirection). The second portion 14 q is continuous with the first portion14 p.

For example, the thickness w4 along the first direction D1 of the firstportion 14 p (referring to FIG. 1A) is, for example, not less than 0.02times and not more than 0.75 times the length w21 (the width) along thefirst direction D1 of the first electrode 21. The thickness w4 along thefirst direction D1 of the first portion 14 p is, for example, not lessthan 0.15 times and not more than 0.75 times the length ta along thefirst direction D1 (e.g., the X-axis direction) of the first insulatingregion 31 a.

In the example shown in FIG. 1A, the thickness of the bottom portion ofthe first insulating film 31 is thicker than the thickness of the sideportion. For example, the length ta along the first direction D1 (e.g.,the X-axis direction) of the first insulating region 31 a is shorterthan the length tb along the second direction D2 (e.g., the Z-axisdirection) of the second insulating region 31 b. By setting thethickness of the bottom portion to be thicker than the thickness of theside portion, for example, the maximum electric field of the firstinsulating film 31 (the gate insulating film) can be suppressed.

As described above, the impurity concentration of the secondconductivity type in the third semiconductor region 13 increases upward.The fifth partial region 13 e, the fourth partial region 13 d, and thethird partial region 13 c recited above are provided in the thirdsemiconductor region 13.

A length to along the second direction D2 of the fifth partial region 13e (referring to FIG. 1A) is, for example, not less than 0.10 μm and notmore than 0.40 μm. The impurity concentration of the second conductivitytype in the fifth partial region 13 e is, for example, not less than1×10¹⁵/cm³ and not more than 1×10¹⁸/cm³.

A length td along the second direction D2 of the fourth partial region13 d (referring to FIG. 1A) is, for example, not less than 0.20 μm andnot more than 0.50 μm. The impurity concentration of the secondconductivity type in the fourth partial region 13 d is, for example,greater than 5×10¹⁶/cm³ but not more than 1×10¹⁸/cm³.

A length tc along the second direction D2 of the third partial region 13c (referring to FIG. 1A) is, for example, not less than 0.30 μm and notmore than 0.50 μm. The impurity concentration of the second conductivitytype in the third partial region 13 c is, for example, greater than1×10¹⁷/cm³ but not more than 3×10¹⁸/cm³.

A length d31 along the second direction D2 of the first insulating film31 is, for example, not less than 0.7 μm and not more than 1.0 μm. Alength w31 along the first direction D1 of the first insulating film 31is, for example, not less than 0.5 μm and not more than 1.0 μm.

For example, the lower end of the bottom portion of the first insulatingfilm 31 is positioned shallower than the upper end of the fourthsemiconductor region 14.

The lower end of the first electrode 21 is positioned deeper than theupper end of the fourth semiconductor region 14.

In the embodiment, the first electrode 21 includes, for example,polysilicon. The first electrode 21 may include at least one of N, B, P,As, or Al. At least one of the second electrode 22 or the thirdelectrode 23 includes, for example, a metal such as at least one of Ni,Ti, Al, Au, Pt, W, or Mo.

At least one of the first insulating film 31 or the second insulatingfilm 32 includes at least one of silicon oxide, silicon nitride, siliconoxynitride, or aluminum oxide.

The description recited above relating to the materials is an example;and these electrodes and insulating films may include other materials inthe embodiment.

An example of the method for manufacturing the semiconductor device 110will now be described.

FIG. 9A to FIG. 9D are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the first embodiment.

A stacked body SB is prepared as shown in FIG. 9A. The stacked body SBincludes a first semiconductor film 11F of the first conductivity typeprovided on a substrate 17 s, a third semiconductor film 13F of thesecond conductivity type provided on the first semiconductor film 11F,and a second semiconductor film 12F of the first conductivity typeprovided on the third semiconductor film 13F. For example, the substrate17 s is used to form the seventh semiconductor region 17. The substrate17 s and the semiconductor films recited above include, for example,silicon carbide.

For example, the third semiconductor film 13F includes the fifth partialregion 13 e, the fourth partial region 13 d, and the third partialregion 13 c.

The concentration of the impurity of the second conductivity type (e.g.,the p-type) in the fifth partial region 13 e is, for example, not lessthan 1×10¹⁵/cm³ and not more than 1×10¹⁸/cm³.

The fourth partial region 13 d is provided on the fifth partial region13 e. The concentration of the impurity of the second conductivity type(e.g., the p-type) in the fourth partial region 13 d is, for example,greater than 5×10¹⁶/cm³ but not more than 1×10¹⁸/cm³.

The third partial region 13 c is provided on the fourth partial region13 d. The concentration of the impurity of the second conductivity type(e.g., the p-type) in the third partial region 13 c is, for example,greater than 1×10¹⁷/cm³ but not more than 3×10¹⁸/cm³.

In the example, the stacked body SB further includes the sixthsemiconductor region 16. For example, the layer that includes the firstsemiconductor region 11 is formed by epitaxial growth. Subsequently, thesecond semiconductor film 12F and the sixth semiconductor region 16 areformed by, for example, ion implantation. The third semiconductor region13 is provided by ion implantation using a mask M1. The firstsemiconductor film 11F includes a region overlapping the mask M1; andthe impurity of the second conductivity type is not introduced to thisregion.

Subsequently, the mask M1 is removed.

As shown in FIG. 9B, a trench T1 is formed in the stacked body SB fromthe second semiconductor film 12F side. For example, a mask M2 is formedon the second semiconductor film 12F and the sixth semiconductor region16. The mask M2 is, for example, a silicon oxide film. The trench T1 isformed in the opening of the mask M2 by performing processing such as,for example, RIE (Reactive Ion Etching), etc.

For example, the trench T1 extends along the (11-20) plane of siliconcarbide. The trench T1 may extend along the (1-100) plane of siliconcarbide.

As shown in FIG. 9C, an impurity I1 of the first conductivity type(e.g., the n-type) is introduced to the side surface of the thirdsemiconductor film 13F. The introduction includes, for example, ionimplantation. The introduction of the impurity I1 may be performed tothe entire surface of the side surface of the third semiconductor film13F.

As described above, the third semiconductor film 13F includes the fifthpartial region 13 e (the lowermost portion), the fourth partial region13 d (the lower portion), and the third partial region 13 c (the upperportion). The concentration of the impurity of the second conductivitytype (e.g., the p-type) is high in the third partial region 13 c.Therefore, the conductivity type of the third partial region 13 c is thep-type even after the impurity I1 of the first conductivity type (e.g.,the n-type) is introduced. On the other hand, the concentration of theimpurity of the second conductivity type (e.g., the p-type) is low inthe fifth partial region 13 e (the lowermost portion) and the fourthpartial region 13 d (the lower portion). Therefore, the conductivitytype of these regions is the n-type after the impurity I1 of the firstconductivity type (e.g., the n-type) is introduced.

For example, the impurity I1 may be introduced to the lower portion ofthe side surface of the third semiconductor film 13F. The side surfaceof the third semiconductor film 13F includes a lower portion 13 bp. Thelower portion 13 bp is exposed at the side wall of the trench T1. Theimpurity I1 may be introduced to the lower portion 13 bp of the sidesurface of the third semiconductor film 13F. The introduction includes,for example, ion implantation.

The impurity concentration of the first conductivity type in the lowerportion 13 bp is higher than the concentration of the impurity of thesecond conductivity type in the lower portion 13 bp. Thereby, the fourthsemiconductor region 14 that is of the first conductivity type isformed. On the other hand, in the upper portion, the p-type impurityconcentration is higher than the n-type impurity after the impurity I1is introduced. This region is used to form a portion of the thirdsemiconductor region 13. The impurity concentration of the firstconductivity type in the fourth semiconductor region 14 is higher thanthe impurity concentration of the first conductivity type in the firstsemiconductor region 11.

For example, the third partial region 13 c includes a region (a firstregion 13 ca referring to FIG. 9C) proximal to the first insulating film31, and a region (a second region 13 cb referring to FIG. 9C) distal tothe first insulating film 31. The first region 13 ca is positionedbetween the second region 13 cb and the first insulating film 31 in theX-axis direction (the first direction D1). For example, the impurityconcentration of the first conductivity type (the n-type) in the firstregion 13 ca is higher than the impurity concentration of the firstconductivity type (the n-type) in the second region 13 cb. For example,the difference between the impurity concentration of the firstconductivity type and the impurity concentration of the secondconductivity type in the first region 13 ca is smaller than thedifference between the impurity concentration of the first conductivitytype and the impurity concentration of the second conductivity type inthe second region 13 cb.

As shown in FIG. 9D, the first insulating film 31 is formed on thesurface of the trench T1 after the impurity I1 is introduced to thelower portion 13 bp. The first electrode 21 is formed by introducing aconductive material into the remaining space of the trench T1 after theformation of the first insulating film 31.

Subsequently, the second insulating film 32, the second electrode 22,and the third electrode 23 are formed. Thereby, the semiconductor device110 can be manufactured.

According to the manufacturing method recited above, a method formanufacturing a semiconductor device can be provided in which theon-resistance can be reduced.

In the manufacturing method recited above, the first electrode 21 andthe first insulating film 31 are formed self-aligningly with respect tothe fourth semiconductor region 14. The positional precision of thefourth semiconductor region 14 with respect to the first electrode 21and the first insulating film 31 is high. Even when the cell pitch isreduced, the fluctuation of the width of the current path is small. Forexample, the decrease of the accumulation resistance is easy.

In the case where the fourth semiconductor region 14 is formed using themanufacturing method recited above, the fourth semiconductor region 14includes the impurity of the second conductivity type and the impurityof the first conductivity type. For example, the fourth semiconductorregion 14 includes the Group III element and the Group V element.

For example, in the semiconductor device 110, the difference between thefirst impurity concentration (the impurity concentration of the firstconductivity type in the fourth semiconductor region 14) and theimpurity concentration of the second conductivity type in the fourthsemiconductor region 14 (the third impurity concentration) is taken as afirst difference. The first impurity concentration is higher than thethird impurity concentration.

On the other hand, the first semiconductor region 11 (the first partialregion 11 a) includes the impurity of the first conductivity type andmay not include the impurity of the second conductivity type. In thecase where the first semiconductor region 11 (the first partial region11 a) includes the impurity of the second conductivity type in additionto the impurity of the first conductivity type, the difference betweenthe second impurity concentration (the impurity concentration of thefirst conductivity type in the first partial region 11 a) and theimpurity concentration (the fourth impurity concentration) of the secondconductivity type in the first partial region 11 a is taken as a seconddifference. The second impurity concentration is higher than the fourthimpurity concentration.

In the embodiment, the first difference is larger than the seconddifference. The first difference is, for example, not less than 10 timesand not more than 60 times the second difference.

Second Embodiment

FIG. 10A and FIG. 10B are schematic views illustrating a semiconductordevice according to a second embodiment.

FIG. 10A is a cross-sectional view corresponding to a cross sectionalong line B1-B2 shown in FIG. 10B. FIG. 1B is a perspective view whencut along line A1-A2 of FIG. 1A.

As shown in FIG. 10A and FIG. 10B, the semiconductor device 120according to the embodiment further includes the fifth semiconductorregion 15 in addition to the first to fourth semiconductor regions 11 to14, the first electrode 21, and the first insulating film 31. Otherwise,the semiconductor device 120 is similar to the semiconductor device 110.For example, the semiconductor device 120 may further include the sixthsemiconductor region 16, the seventh semiconductor region 17, the secondelectrode 22, the third electrode 23, and the second insulating film 32.The fifth semiconductor region 15 will now be described. A descriptionis omitted for the portions similar to those of the semiconductor device110.

In the semiconductor device 120, the fifth semiconductor region 15 isprovided between the second partial region 11 b and the first insulatingfilm 31 in the second direction D2 (e.g., the Z-axis direction). Thefifth semiconductor region 15 is of the first conductivity type (e.g.,the n-type). The fifth semiconductor region 15 is provided under thefirst electrode 21. The fifth semiconductor region 15 includes, forexample, silicon carbide.

The impurity concentration of the first conductivity type in the fifthsemiconductor region 15 is higher than the impurity concentration of thefirst conductivity type in the second partial region 11 b. The impurityconcentration of the first conductivity type in the fifth semiconductorregion 15 may be lower than the first impurity concentration (theimpurity concentration of the first conductivity type in the fourthsemiconductor region 14).

The impurity concentration of the second conductivity type in the fifthsemiconductor region 15 is, for example, not less than 1×10¹⁵/cm³ andnot more than 4×10¹⁷/cm³. The impurity concentration of the secondconductivity type in the fourth semiconductor region 14 is, for example,not less than 1×10¹⁷/cm³ and not more than 5×10¹⁸/cm³. The impurityconcentration of the second conductivity type in the first semiconductorregion 11 (e.g., the first partial region 11 a) is, for example, notless than 1×10¹⁵/cm³ and not more than 8×10¹⁶/cm³.

A low on-resistance is obtained in such a semiconductor device 120 aswell. In the embodiment, an even lower on-resistance is obtained becausethe reduction of the cell pitch is easy.

For example, as described above, the third semiconductor region 13includes the fifth partial region 13 e. The fifth partial region 13 e isprovided between the fourth partial region 13 d and the first partialregion 11 a in the second direction D2 (e.g., the Z-axis direction). Thefifth partial region 13 e overlaps the fifth semiconductor region 15 inthe first direction D1 (e.g., the X-axis direction).

For example, the fifth semiconductor region 15 may include the impurityof the second conductivity type. For example, the fifth semiconductorregion 15 may include a Group III element and a Group V element. Forexample, the difference between the impurity concentration of the firstconductivity type in the fifth semiconductor region 15 and the impurityconcentration of the second conductivity type in the fifth semiconductorregion 15 is larger than the difference between the impurityconcentration of the first conductivity type in the first partial region11 a and the impurity concentration of the second conductivity type inthe first partial region 11 a.

An example of a method for manufacturing the semiconductor device 120will now be described.

At least a portion of the method for manufacturing the semiconductordevice 110 is applicable to the method for manufacturing thesemiconductor device 120.

FIG. 11A to FIG. 11E are schematic cross-sectional views in order of theprocesses, illustrating the method for manufacturing the semiconductordevice according to the second embodiment.

The stacked body SB is prepared as shown in FIG. 11A. The stacked bodySB includes the first semiconductor film 11F of the first conductivitytype provided on the substrate 17 s, the third semiconductor film 13F ofthe second conductivity type provided on the first semiconductor film11F, and the second semiconductor film 12F of the first conductivitytype provided on the third semiconductor film 13F. For example, thesubstrate 17 s is used as the seventh semiconductor region 17. Thesubstrate 17 s and the semiconductor films recited above include, forexample, silicon carbide. For example, the third semiconductor film 13Fincludes the fifth partial region 13 e, the fourth partial region 13 d,and the third partial region 13 c. In the example, the stacked body SBfurther includes the sixth semiconductor region 16.

As shown in FIG. 11B, the trench T1 is formed in the stacked body SBfrom the second semiconductor film 12F.

As shown in FIG. 11C, the side surface of the third semiconductor film13F includes the lower portion 13 bp. The lower portion 13 bp is exposedat the side wall of the trench T1. The impurity I1 of the firstconductivity type (e.g., the n-type) is introduced to the lower portion13 bp of the side surface of the third semiconductor film 13F. Theintroduction includes, for example, ion implantation.

The trench T1 includes a bottom portion Tb1 as shown in FIG. 11D. Forexample, a portion (e.g., the fifth partial region 13 e) of the thirdsemiconductor film 13F is exposed at the bottom portion Tb1. An impurityI2 of the first conductivity type is introduced to the bottom portionTb1 of the trench T1. Thereby, a portion of the fifth partial region 13e corresponding to the bottom portion Tb1 is of the first conductivitytype. This portion is used as the fifth semiconductor region 15. Theregion where the impurity I2 is substantially not introduced is used asa portion of the third semiconductor region 13.

As shown in FIG. 11C and FIG. 11D, the angle between the introductiondirection of the impurity I1 and the second direction D2 (the stackingdirection of the stacked body SB) is smaller than the angle between theintroduction direction of the impurity I2 and the second direction D2.The fourth semiconductor region 14 is easy to form due to theintroduction of such an impurity I1. The fifth semiconductor region 15is easy to form due to the introduction of such an impurity I2. Theformation of the fourth semiconductor region 14 and the formation of thefifth semiconductor region 15 are performed substantially independentlyfrom each other. The controllability of the formation of thesesemiconductor regions increases.

As shown in FIG. 11E, the first insulating film 31 is formed on thesurface of the trench T1 after the introduction of the impurity I1 tothe lower portion 13 bp. The first electrode 21 is formed by introducinga conductive material to the remaining space of the trench T1 after theformation of the first insulating film 31.

Subsequently, the second insulating film 32, the second electrode 22,and the third electrode 23 are formed. Thereby, the semiconductor device120 can be manufactured.

Thus, in the manufacturing method recited above, the impurity of thefirst conductivity type is introduced to the bottom portion Tb1 of thetrench T1 prior to the formation of the first insulating film 31.Thereby, the fifth semiconductor region 15 can be formed.

According to the manufacturing method recited above, a method formanufacturing a semiconductor device can be provided in which theon-resistance can be reduced.

Third Embodiment

FIG. 12 is a schematic cross-sectional view illustrating a semiconductordevice according to a third embodiment.

As shown in FIG. 12, the semiconductor device 130 according to theembodiment includes a seventh semiconductor region 17A in addition tothe first to fourth semiconductor regions 11 to 14, the first electrode21, and the first insulating film 31. Otherwise, the semiconductordevice 130 is similar to the semiconductor device 110. For example, thesemiconductor device 130 may further include the sixth semiconductorregion 16, the second electrode 22, the third electrode 23, and thesecond insulating film 32. The seventh semiconductor region 17A of thesemiconductor device 130 is of the second conductivity type. Otherwise,the semiconductor device 130 is similar to the semiconductor device 110.

FIG. 13 is a schematic cross-sectional view illustrating anothersemiconductor device according to the third embodiment.

As shown in FIG. 13, the semiconductor device 140 according to theembodiment further includes the fifth semiconductor region 15 inaddition to the first to fourth semiconductor regions 11 to 14, thefirst electrode 21, and the first insulating film 31. Otherwise, thesemiconductor device 140 is similar to the semiconductor device 130. Forexample, the semiconductor device 140 may further include the sixthsemiconductor region 16, the seventh semiconductor region 17A, thesecond electrode 22, the third electrode 23, and the second insulatingfilm 32.

In the semiconductor devices 130 and 140, the seventh semiconductorregion 17A is, for example, a substrate of the second conductivity type.The seventh semiconductor region 17A is provided between the thirdelectrode 23 and the first semiconductor region 11.

The semiconductor devices 130 and 140 are, for example, IGBTs (InsulatedGate Bipolar Transistors). In the semiconductor devices 130 and 140 aswell, a semiconductor device can be provided in which the on-resistancecan be reduced.

For example, the semiconductor device 130 can be manufactured byappropriately modifying the manufacturing method described in referenceto FIG. 9A to FIG. 9D. For example, the semiconductor device 140 can bemanufactured by appropriately modifying the manufacturing methoddescribed in reference to FIG. 11A to FIG. 11E.

According to the embodiments, a semiconductor device and a method formanufacturing the semiconductor device can be provided in which theon-resistance can be reduced.

In the embodiments, the information that relates to the impurityconcentration is obtained by, for example, SIMS (Secondary Ion MassSpectrometry), etc. In the description recited above, for example, theinformation that relates to the carrier concentration may be obtained bySCM (Scanning Capacitance Microscopy), etc.; and the impurityconcentration may be obtained based on the carrier concentration.

In this specification, the “state of being electrically connected”includes the state in which multiple conductive bodies are physically incontact, and a current flows between the multiple conductive bodies. The“state of being electrically connected” includes the state in whichanother conductive body is inserted between multiple conductive bodies,and a current flows between the multiple conductive bodies.

In the specification of the application, “perpendicular” and “parallel”refer to not only strictly perpendicular and strictly parallel but alsoinclude, for example, the fluctuation due to manufacturing processes,etc. It is sufficient to be substantially perpendicular andsubstantially parallel.

Hereinabove, exemplary embodiments of the invention are described withreference to specific examples. However, the embodiments of theinvention are not limited to these specific examples. For example, oneskilled in the art may similarly practice the invention by appropriatelyselecting specific configurations of components included insemiconductor devices such as semiconductor regions, electrodes,insulating films, etc., from known art. Such practice is included in thescope of the invention to the extent that similar effects thereto areobtained.

Further, any two or more components of the specific examples may becombined within the extent of technical feasibility and are included inthe scope of the invention to the extent that the purport of theinvention is included.

Moreover, all semiconductor devices, and methods for manufacturing thesame practicable by an appropriate design modification by one skilled inthe art based on the semiconductor devices, and the methods formanufacturing the same described above as embodiments of the inventionalso are within the scope of the invention to the extent that thepurport of the invention is included.

Various other variations and modifications can be conceived by thoseskilled in the art within the spirit of the invention, and it isunderstood that such variations and modifications are also encompassedwithin the scope of the invention.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the invention.

The invention claimed is:
 1. A semiconductor device, comprising: a firstsemiconductor region including a first partial region and a secondpartial region and being of a first conductivity type; a secondsemiconductor region separated from the first partial region in a seconddirection crossing a first direction, the second semiconductor regionbeing of the first conductivity type, the first direction being from thefirst partial region toward the second partial region; a thirdsemiconductor region provided between the first partial region and thesecond semiconductor region, the third semiconductor region being of asecond conductivity type and comprising a third partial region and afourth partial region, the fourth partial region being positionedbetween the first partial region and the third partial region; a firstelectrode separated from the second partial region in the seconddirection and separated from the second semiconductor region and thethird semiconductor region in the first direction; a first insulatingfilm comprising a first insulating region and a second insulatingregion, the first insulating region being provided between the secondsemiconductor region and the first electrode in the first direction andbetween the third semiconductor region and the first electrode in thefirst direction, a portion of the first insulating region contacting thethird partial region, the second insulating region being providedbetween the second partial region and the first electrode in the seconddirection; and a fourth semiconductor region comprising a first portionand being of the first conductivity type, the first portion beingprovided between the fourth partial region and at least a portion of thefirst insulating film in the first direction, wherein an impurityconcentration of the second conductivity type in the third partialregion is higher than an impurity concentration of the secondconductivity type in the fourth partial region, the third semiconductorregion further comprises a fifth partial region provided between thefourth partial region and the first partial region in the seconddirection, and the impurity concentration of the second conductivitytype in the fourth partial region is higher than an impurityconcentration of the second conductivity type in the fifth partialregion.
 2. The device according to claim 1, wherein the fifth partialregion does not overlap the second insulating region in the firstdirection.
 3. The device according to claim 1, wherein a length alongthe first direction of the first insulating region is shorter than alength along the second direction of the second insulating region. 4.The device according to claim 1, wherein a thickness along the firstdirection of the first portion is not less than 0.15 times and not morethan 0.75 times a length along the first direction of the firstinsulating region.
 5. The device according to claim 1, wherein athickness along the first direction of the first portion is not lessthan 0.015 μm and not more than 0.45 μm.
 6. The device according toclaim 1, wherein at least a portion of the first portion is positionedbetween the second insulating region and the fourth partial region inthe first direction.
 7. The device according to claim 1, wherein aportion of the first portion is positioned between the first insulatingregion and the fourth partial region in the first direction.
 8. Thedevice according to claim 1, wherein a portion of the first electrode inthe first direction overlaps a portion of the fourth semiconductorregion.
 9. The device according to claim 1, wherein the fourthsemiconductor region further comprises a second portion, and the secondportion overlaps the first insulating region in the second direction.10. The device according to claim 9, wherein the second portion overlapsa portion of the first electrode in the second direction.
 11. The deviceaccording to claim 1, wherein a first impurity concentration of thefirst conductivity type in the fourth semiconductor region is higherthan a second impurity concentration of the first conductivity type inthe first partial region.
 12. The device according to claim 11, whereina first difference between the first impurity concentration and a thirdimpurity concentration of the second conductivity type in the fourthsemiconductor region is larger than a second difference between thesecond impurity concentration and a fourth impurity concentration of thesecond conductivity type in the first partial region.
 13. The deviceaccording to claim 11, wherein the first impurity concentration is notless than 1×10¹⁷/cm³ and not more than 5×10¹⁸/cm³.
 14. The deviceaccording to claim 1, wherein a direction from a part of the fourthsemiconductor region toward the third partial region is along the seconddirection.
 15. The device according to claim 1, wherein a direction fromthe fifth partial region towards a part of the first semiconductorregion aligns with the first direction.
 16. The device according toclaim 1, wherein a lower end of the third semiconductor region ispositioned lower than a lower end of the first insulating film.
 17. Asemiconductor device, comprising: a first semiconductor regioncomprising a first partial region and a second partial region and beingof a first conductivity type; a second semiconductor region separatedfrom the first partial region in a second direction crossing a firstdirection, the second semiconductor region being of the firstconductivity type, the first direction being from the first partialregion toward the second partial region; a third semiconductor regionprovided between the first partial region and the second semiconductorregion, the third semiconductor region being of a second conductivitytype and comprising a third partial region and a fourth partial region,the fourth partial region being positioned between the first partialregion and the third partial region; a first electrode separated fromthe second partial region in the second direction and separated from thesecond semiconductor region and the third semiconductor region in thefirst direction; a first insulating film comprising a first insulatingregion and a second insulating region, the first insulating region beingprovided between the second semiconductor region and the first electrodein the first direction and between the third semiconductor region andthe first electrode in the first direction, a portion of the firstinsulating region contacting the third partial region, the secondinsulating region being provided between the second partial region andthe first electrode in the second direction; and a fourth semiconductorregion comprising a first portion and being of the first conductivitytype, the first portion being provided between the fourth partial regionand at least a portion of the first insulating film in the firstdirection, wherein the first to fourth semiconductor regions comprisesilicon carbide, and the fourth semiconductor region comprises a GroupIII element and a Group V element.
 18. A semiconductor device,comprising: a first semiconductor region comprising a first partialregion and a second partial region and being of a first conductivitytype; a second semiconductor region separated from the first partialregion in a second direction crossing a first direction, the secondsemiconductor region being of the first conductivity type, the firstdirection being from the first partial region toward the second partialregion; a third semiconductor region provided between the first partialregion and the second semiconductor region, the third semiconductorregion being of a second conductivity type and comprising a thirdpartial region and a fourth partial region, the fourth partial regionbeing positioned between the first partial region and the third partialregion; a first electrode separated from the second partial region inthe second direction and separated from the second semiconductor regionand the third semiconductor region in the first direction; a firstinsulating film comprising a first insulating region and a secondinsulating region, the first insulating region being provided betweenthe second semiconductor region and the first electrode in the firstdirection and between the third semiconductor region and the firstelectrode in the first direction, a portion of the first insulatingregion contacting the third partial region, the second insulating regionbeing provided between the second partial region and the first electrodein the second direction; a fourth semiconductor region comprising afirst portion and being of the first conductivity type, the firstportion being provided between the fourth partial region and at least aportion of the first insulating film in the first direction; and a fifthsemiconductor region provided between the second partial region and thefirst insulating region, the fifth semiconductor region being of thefirst conductivity type, an impurity concentration of the firstconductivity type in the fifth semiconductor region being higher than animpurity concentration of the first conductivity type in the secondpartial region, wherein the third semiconductor region further comprisesa fifth partial region provided between the fourth partial region andthe first partial region in the second direction, and the fifth partialregion overlaps the fifth semiconductor region in the first direction.